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HomeMaterials Science ForumMaterials Science Forum Vol. 848Synthesis of Silicon Microspheres

Synthesis of Silicon Microspheres

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Abstract:

The synthesis of silicon microspheres is of outmost importance, especially for the production of optical and electrical devices due to their unique properties displayed by this material. In this paper, we review the research on the synthesis of silicon microspheres, including one physical method, the drop method and several chemical methods, such as vapor-phase reaction, vapor-solid reaction, liquid phase reaction and magnesio-thermal reduction method. The formation mechanisms for silicon microsphere particles are also summarized.

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Periodical:

Materials Science Forum (Volume 848)

Pages:

505-518

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.848.505

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Online since:

March 2016

Authors:

Lian Yun Liu, Ting Ting Zhang, Hui Zhang, Xia Xia Bai, Stefano Polizzi

Keywords:

Microspheres, Silicon, Synthesis

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[1] S. M. Sze, Physics of semiconductor devices, second ed., Wiley, New York, (1981).

[2] B. G. Streetman, S. Banerjee, Solid State Electronic Devices, fifth ed., Prentice Hall, New Jersey, (2000).

[3] Ali. Serpengüzel, A. Kurt and U. K. Ayaz, Silicon microspheres for electronic and photonic integration, Photonics and Nanostructures-Fundamentals and Applications 6(2008)179-182.

DOI: 10.1016/j.photonics.2008.08.005

[4] O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, Two-dimensional photonic band-gap defect mode laser, Science. 284(1999)1819-1821.

DOI: 10.1126/science.284.5421.1819

[5] A. Blanco, E. Chomski, S. Grabtchak, M. Ibisate, S. John, S.W. Leonard, Large scale synthesis of a silicon photonic crystal with a complete three dimensional bandgap near 1. 5 micrometers, Nature. 405(2000)437-440.

DOI: 10.1038/35013024

[6] B. S. Song, S. Noda and T. Asano, Photonic devices based on in-plane hetero photonic crystals, Science. 300 (2003)1537-1537.

DOI: 10.1126/science.1083066

[7] A. Liu, H. Rong, M. Paniccia, O. Cohen, D. Hak, Net optical gain in a low loss silicon-on-insulator waveguide by stimulated Raman scattering, Optics Express. 12(2004) 4261-4268.

DOI: 10.1364/opex.12.004261

[8] H. Rong, A. Liu, R. Nicolaescu, M. Paniccia, Raman gain and nonlinear optical absorption measurements in a low-loss silicon waveguide, Applied Physics Letters. 85 (2004)2196-2198.

DOI: 10.1063/1.1794862

[9] R. Jones, H. Rong, A. Liu, A. Fang, M. Paniccia, Net continuous wave optical gain in a low loss silicon-on-insulator waveguide by stimulated Raman scattering, Optics Express. 13 (2005) 19-25.

DOI: 10.1364/opex.13.000519

[10] J. Song, Y. Li, X. Zhou, X. Li, Planar grating multiplexers using silicon nanowire technology: numerical simulations and fabrications, Progress in Electromagnetics Research. 123 (2012) 509-526.

DOI: 10.2528/pier11110402

[11] H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, A continuous-wave Raman silicon laser, Nature. 433 (2005) 725-728.

DOI: 10.1038/nature03346

[12] K. J. Vahala, Optical microcavities, Nature. 424 (2003) 839-846.

[13] T. Minemoto, C. Okamoto, S. Omae, M. Murozono, H. Takakura, Y. Hamakawa, Fabrication of spherical silicon solar cells with semi-light-concentration system, Japanese Journal of Applied Physics. 44(2005)4820-4824.

DOI: 10.1143/jjap.44.4820

[14] T. Minemoto, H. Takakura, Fabrication of spherical silicon crystals by dropping method and their application to solar cells, Japanese Journal of Applied Physics. 46(2007) 4016-4020.

DOI: 10.1143/jjap.46.4016

[15] T. Ikuta, T. Minemoto, H. Takakura, Y. Hamakawa, Optical design of spherical silicon solar cells with reflector cup, Japanese Journal of Applied Physics. 45 (2006) 3938-3942.

DOI: 10.1143/jjap.45.3938

[16] S. Omae, T. Minemoto, M. Murozono, H. Takakura, Y. Hamakawa, Crystal characterization of spherical silicon solar cell by X-ray diffraction, Japanese Journal of Applied Physics. 45 (2006) 3933-3937.

DOI: 10.1143/jjap.45.3933

[17] H. C. Tapalian, J. P. Laine, P. A. Lane, Thermooptical switches using coated microsphere resonators, IEEE Photonics Technology Letters. 14 (2002) 1118-1120.

DOI: 10.1109/lpt.2002.1021988

[18] I. Teraoka, S. Arnold, and F. Vollmer, Perturbation approach to resonance shifts of whispering-gallery modes in a dielectric microsphere as a probe of a surrounding medium, Journal of the Optical Society of America B. 20 (2003)1937-(1946).

DOI: 10.1364/josab.20.001937

[19] A. B. Matsko, A. A. Savchenkov, V. S. Ilchenko, L. Maleki, Optical gyroscope with whispering gallery mode optical cavities, Optics Communications. 233 (2004) 107-112.

DOI: 10.1016/j.optcom.2004.01.035

[20] Y. O. Yilmaz, A. Demir, A. Kurt, A. Serpenguzel, Optical channel dropping with a silicon microsphere, IEEE Photonics Technology Letters. 17 (2005) 1662-1664.

DOI: 10.1109/lpt.2005.850896

[21] M. Lu, H. Zhang, Controllable synthesis of spherical silicon and its performance as an anode for lithium-ion batteries, Ionics. 19 (2013) 1695-1698.

DOI: 10.1007/s11581-013-1006-y

[22] J. Xie, G. Wang, Y. Huo, S. Zhang, G. Cao, X. Zhao, Nanostructured silicon spheres prepared by a controllable magnesiothermic reduction as anode for lithium ion batteries, Electrochimica Acta. 135 (2014) 94-100.

DOI: 10.1016/j.electacta.2014.05.012

[23] S. Omae, T. Minemoto, M. Murozono, H. Takakura, Y. Hamakawa, Crystal growth mechanism of spherical silicon fabricated by dropping method, Japanese Journal of Applied Physics. 45(2006)3577-3580.

DOI: 10.1143/jjap.45.3577

[24] R. Körmer, M. Jank, H. Ryssel, H. J. Schmid, W. Peukert, Aerosol synthesis of silicon nanoparticles with narrow size distribution-part 1: Experimental investigations, Journal of Aerosol Science. 41 (2010) 998-1007.

DOI: 10.1016/j.jaerosci.2010.05.007

[25] R. Fenollosa, F. Meseguer, M. Tymczenko, Silicon colloids: from micro-cavities to photonic sponges, Advanced Materials. 20 (2008) 95-98.

DOI: 10.1002/adma.200701589

[26] L. E. Pell, A. D. Schricker, F. V. Mikulec, B. A. Korgel, Synthesis of amorphous silicon colloids by trisilane thermolysis in high temperature supercritical solvents, Langmuir. 20 (2004) 6546-6548.

DOI: 10.1021/la048671o

[27] J. Zhu, R. Liu, J. Xu, C. Meng, Preparation and characterization of mesoporous silicon spheres directly from MCM-48 and their response to ammonia, Journal of Materials Science. 46(2011) 7223-7227.

DOI: 10.1007/s10853-011-5680-8

[28] S. Omae, C. Okamoto, H. Takakura, Y. Hamakawa, M. Murozono, Crystal structure analysis of spherical silicon using X-Ray pole figures, Solid State Phenom. 93 (2003) 249-256.

DOI: 10.4028/www.scientific.net/ssp.93.249

[29] X. Huang, S. Uda, H. Tanabe, N. Kitahara, H. Arimune, K. Hoshikawa, In situ observations of crystal growth of spherical Si single crystals, Journal of Crystal Growth. 307 (2007) 341-347.

DOI: 10.1016/j.jcrysgro.2007.07.005

[30] S. Omae, T. Minemoto, M. Murozono, H. Takakura, Y. Hamakawa, Crystal evaluation of spherical silicon produced by dropping method and their solar cell performance, Solar Energy Materials & Solar Cells. 90 (2006) 3614-3623.

DOI: 10.1016/j.solmat.2006.06.056

[31] Z. Liu, T. Nagai, A. Masuda, M. Kondo, K. Sakai, K. Asai, Seeding method with silicon powder for the formation of silicon spheres in the drop method, Journal of Applied Physics. 101 (2007) 093505(1-5).

DOI: 10.1063/1.2718872

[32] C. Okamoto, T. Minemoto, M. Murozono, H. Takakura, Y. Hamakawa, Electric and crystallographic characterizations on hydrogen passivated spherical silicon solar cells, Japanese Journal of Applied Physics. Part 1, 44 (2005) 7372-7376.

DOI: 10.1143/jjap.44.7372

[33] C. Okamoto, K. Tsujiya, T. Minemoto, M. Murozono, H. Takakura, Y. Hamakawa, Reduction in dislocation density of spherical silicon solar cells fabricated by decompression dropping method, Japanese Journal of Applied Physics. Part 1, 44 (2005).

DOI: 10.1143/jjap.44.8351

[34] Z. Liu, K. Asai, A. Masuda, T. Nagai, Y. Akashi, M. Murozono, Improvement of the production yield of spherical Si by optimization of the seeding technique in the dropping method, Japanese Journal of Applied Physics. 46(2007) 5695-5700.

DOI: 10.1143/jjap.46.5695

[35] Y. Kuzuokaa, S. Isomaeb, and Y. Yamaguchi, Crystal morphology of spherical silicon particles produced by jet-splitting method, Journal of Crystal Growth. 304 (2007) 487-491.

DOI: 10.1016/j.jcrysgro.2007.02.030

[36] M. Gharghi, S. Sivoththaman, Growth and structural characterization of spherical silicon crystals grown from polysilicon, Journal of Electronic Materials. 37 (2008) 1657-1664.

DOI: 10.1007/s11664-008-0547-8

[37] S. Ueno, H. Kobatake, H. Fukuyama, S. Awaji, H. Nakajima, Formation of silicon hollow spheres via electromagnetic levitation method under static magnetic field in hydrogen–argon mixed gas, Materials Letters. 63(2009) 602-604.

DOI: 10.1016/j.matlet.2008.11.048

[38] S. P. Walch, C. E. Dateo, Thermal decomposition pathways and rates for silane, chlorosilane, dichlorosilane and trichlorosilane, Journal of Physical Chemistry. 105 (2001) 2015-(2022).

DOI: 10.1021/jp003559u

[39] W. A. P. Claasen, J. Bloem, The nucleation of CVD silicon on SiO2 and Si3N4 substrates, Journal of the Electrochemical Society. 127 (1980) 194-202.

[40] W. O. Filtvedt, A. Holt, P. A. Ramachandran, M. C. Melaaen, Chemical vapor deposition of silicon from silane: Review of growth mechanisms and modeling / scale up of fluidized bed reactors, Solar Energy Materials & Solar Cells. 107(2012) 188-200.

DOI: 10.1016/j.solmat.2012.08.014

[41] J. J. Wu, H. V. Nguyen, R. C. Flagan, A method for the synthesis of submicron particles, Langmuir. 3(1987) 266-271.

DOI: 10.1021/la00074a021

[42] K. A. Littau, P. J. Szajowski, A. J. Muller, A. R. Kortan, L. E. Bm, A luminescent silicon nanocrystal colloid via a high-temperature aerosol reaction, The Journal of Physical Chemistry. 97 (1993) 1224-1230.

DOI: 10.1021/j100108a019

[43] M. Tao, L. P. Hunt, The thermodynamic behavior of the Si-H system and its role in Si CVD from SiH4, Journal of the Electrochemical Society. 139(1992) 806-809.

DOI: 10.1149/1.2069307

[44] M. T. Swihart, S. L. Girshick, Thermochemistry and kinetics of silicon hydride cluster formation during thermal decomposition of silane, The Journal of Physical Chemistry B. 103(1999) 64-76.

DOI: 10.1021/jp983358e

[45] N. K. Serdyuk, V. P. Strunin, E. N. Chesnokov, V. N. Panfilov, Isotope exchange during thermal decomposition of the mixture SiH4 + SiD, Kinetikai Kataliz (Russia). 26(1985) 790-798.

[46] R. Becerra, R. Walsh, Some mechanistic problems in the kinetic modeling of monosilane pyrolysis, The Journal of Physical Chemistry. 96 (1992) 10856-10862.

DOI: 10.1021/j100205a047

[47] A. A. Onischuk, V. P. Strunin, M. A. Ushakova, V. N. Panfilov, Aerosol particles under silane pyrolysis, Chemical Physics (Russia). 13(1994)129-138.

[48] M. B. Zbib, U. Sahaym, and D. Bahri, Characterization of silicon nanoparticles formed from a fluidized bed reactor and their incorporation onto metal-coated carbon fibers, Journal of metals. 66(2014) 82-86.

DOI: 10.1007/s11837-013-0805-y

[49] A. A. Onischuk, V. P. Strunin, M. A. Ushakova, V. N. Panfilov, On the pathways of aerosol formation by thermal decomposition of silane, Journal of Aerosol Science. 28(1997) 207-222.

DOI: 10.1016/s0021-8502(96)00061-4

[50] F. Huisken, H. Hofmeister, B. Kohn, M. A. Laguna, V. Paillard, Laser production and deposition of light-emitting silicon nanoparticles, Applied Surface Science. 154-155(2000)305-313.

DOI: 10.1016/s0169-4332(99)00476-6

[51] M. J. Kirchhof, H. J. Schmid, W. Peukert, Reactor system for the study of high-temperature short-time sintering of nanoparticles, Review of Scientific Instruments. 75(2004) 4833-4840.

DOI: 10.1063/1.1809258

[52] J. Fernández de la Mora, N. Rao, P. H. Mc Murry, Inertial impaction of fine particles at moderate Reynolds numbers and in the transonic regime with a thin-plate orifice nozzle, Journal of Aerosol Science. 21 (1990) 889-909.

DOI: 10.1016/0021-8502(90)90160-y

[53] S. Balaji, J. Du, C. M. White, B. E. Ydstie, Multi-scale modeling and control of fluidized beds for the production of solar grade silicon, Powder Technology. 199(2010) 23-31.

DOI: 10.1016/j.powtec.2009.04.022

[54] J. Du, B. E. Ydstie, Modeling and control of particulate processes and application to poly-silicon production, Chemical Engineering Science. 67(2012) 120-130.

DOI: 10.1016/j.ces.2011.08.023

[55] S. K. Iya, U.S. Patent, 4, 684, 513. (1987).

[56] C. M. White, P. Ege and B. E. Ydstie, Size distribution modeling for fluidized bed solar-grade silicon production, Powder Technology. 163(2006) 51-58.

DOI: 10.1016/j.powtec.2006.01.005

[57] M. Frenklach, L. Ting, H. Wang, M. J. Rabinowtiz, Silicon particle formation in pyrolysis of silane and disilane, Israel Journal of Chemistry. 36 (1996) 293-303.

DOI: 10.1002/ijch.199600041

[58] P. Ho, M. E. Coltrin, W. G. Breiland, Laser-induced fluorescence measurements and kinetic analysis of Si atom formation in a rotating disk chemical vapor deposition reactor. Journal of Physical Chemistry, 98(1994) 10138-10147.

DOI: 10.1021/j100091a032

[59] C. Hollenstein, J. L. Dorier, J. Dutta, A. A. Howling, Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering, Plasma Sources Science & Technology. 3(1994) 278-285.

DOI: 10.1088/0963-0252/3/3/007

[60] A. A. Onischuk, A. I. Levykin, V. P. Strunin, K. K. Sabelfeld, V. N. Panfilov, Aggregate formation under homogeneous silane thermal decomposition, Journal of Aerosol Science. 31(2000), 1263-1281.

DOI: 10.1016/s0021-8502(00)00031-8

[61] R. Körmer, H. J. Schmid, and W. Peukert, Aerosol synthesis of silicon nanoparticles with narrow size distribution-Part 2: Theoretical analysis of the formation mechanism, Journal of Aerosol Science. 41 (2010) 1008-1019.

DOI: 10.1016/j.jaerosci.2010.08.002

[62] W. J. Menz, M. Kraft, A new model for silicon nanoparticle synthesis, Combustion and Flame. 160(2013) 947-958.

DOI: 10.1016/j.combustflame.2013.01.014

[63] T. Hogness, T. Wilson, and W. Johnson, The thermal decomposition of silane, Journal of the American Chemical Society. 58(1936) 108-112.

DOI: 10.1021/ja01292a036

[64] J. H. Purnell, R. Walsh, The pyrolysis of monosilane, Proceedings of the Royal Society Series A. 293(1966) 543-561.

[65] A. Yuuki, Y. Matsui and K. Tachibana, A numerical study on gaseous reactions in silane pyrolysis, Japanese Journal of Applied Physics. 27 (1987) 747-754.

DOI: 10.1143/jjap.26.747

[66] H. V. Nguyen, R. C. Flagan, Particle formation and growth in single-stage aerosol reactors, Langmuir. 7(1991) 1807-1814.

DOI: 10.1021/la00056a038

[67] F. Slootman, J. Parent, Homogeneous gas-phase nucleation in silane pyrolysis, Journal of Aerosol Science. 25 (1994) 15-21.

DOI: 10.1016/0021-8502(94)90178-3

[68] S. L. Girshick, C. P. Chiu, Homogeneous nucleation of particles from the vapor phase in thermal plasma synthesis, Plasma Chemistry & Plasma Processing. 9(1989) 355-369.

DOI: 10.1007/bf01083672

[69] C. S. Herrick, D. W. Woodruff, The homogeneous nucleation of condensed silicon in the gaseous Si-H-Cl system, Journal of the Electrochemical Society. 131 (1984) 2417-2422.

DOI: 10.1149/1.2115307

[70] F. E. Kruis, J. Schoonman and B. Scarlett, Homogeneous nucleation of silicon, Journal of Aerosolence. 25(1994) 1291-1304.

DOI: 10.1016/0021-8502(94)90126-0

[71] W. J. Menz, S. Shekar, G. Brownbridge, S. Mosbach, R. Körmer, W. Peukert, Synthesis of silicon nanoparticles with a narrow size distribution: A theoretical study, Journal of Aerosol Science. 44 (2012) 46-61.

DOI: 10.1016/j.jaerosci.2011.10.005

[72] M. Sander, R. H. West and M. S. C. M. Kraft, A detailed model for the sintering of poly-dispersed nanoparticle agglomerates, Aerosol Science & Technology. 43(2009), 978-989.

DOI: 10.1080/02786820903092416

[73] M. Celnik, R. Patterson, M. Kraft, W. Wagner, Coupling a stochastic soot population balance to gas-phase chemistry using operator splitting, Combustion and Flame. 148(2007) 158-176.

DOI: 10.1016/j.combustflame.2006.10.007

[74] W. Koch, S. K. Friedlander, The effect of particle coalescence on the surface area of a coagulating aerosol, Journal of Aerosol Science. 140(1990), 419-427.

DOI: 10.1016/0021-9797(90)90362-r

[75] K. Sinniah, M. G. Sherman, L. B. Lewis, W. H. Weinberg, J. T. J. Yates, K. C. Janda, Hydrogen desorption from the monohydride phase on Si(100), Journal of Chemical Physics. 92 (1990) 5700-5711.

DOI: 10.1063/1.458501